Plenary I
Plenary II
Plenary III
Deputy Head of Department, Professor, Head of Division, Head of Unit
Keynote I Symposium A.
Topic: Effect of F-rich Additive Gases on the High Aspect Ratio Contact Etch Characteristics
Keynote II Symposium A.
Topic: Ultra-high-aspect-ratio etching utilizing innovative cryogenic process
Keynote III Symposium B.
Topic: Myths and Imperfections of (Nevertheless Useful) Atomic-Layer Etching
Keynote IV Symposium C.
Topic: PVD eco-deposition for sustainable development: low temperature thin film growth using metal-ion/surface interactions
Keynote V Symposium B.
Topic: Reactive Nitrogen Species Synthesized by Air Plasma to Achieve Sustainable Farming
Keynote VI Symposium B.
Topic: The applications of atmospheric pressure plasma jet on lithium-ion battery and food waste
Keynote VII Symposium C.
Topic: Epitaxial Bi2O2x homojunctions for advanced electronics
Keynote VIII Symposium B.
Topic: Plasma Seed Treatment Technology for Providing Climate Change Adaptability of Plants
Keynote IX Symposium B.
Topic: Study on blue light micro-light emitted diodes (< 20 µm) by neutral beam etching process
Keynote X Symposium B.
Topic: Investigation of Spatiotemporal Behaviors in Detached Recombing Plasmas Using a Linear High-Density Plasma Simulator