Plenary Speakers

Plenary I

Prof. Eun Ha Choi

Kwangwoon University, Republic of Korea

  • Professor and Director
  • Plasma Bioscience Research Center (PBRC)
  • Applied Plasma Medicine Center (APMC)
  • Department of Electrical and Biological Physics

Plenary II

Prof. Mark J. Kushner

University of Michigan, USA

  • Director and Founder, Michigan Institute for Plasma Science and Engineering
  • Director and Founder, DOE Center on Control of Plasma Kinetics

Plenary III

Prof. Johanna Rosen

Linköping University, Sweden

  • Deputy Head of Department, Professor, Head of Division, Head of Unit


Keynote Speakers

Keynote I Symposium A.

Prof. Geun Young Yeom

Sungkyunkwan University, Korea

Topic: Effect of F-rich Additive Gases on the High Aspect Ratio Contact Etch Characteristics


Keynote II Symposium A.

Dr. Yoshihide Kihara

Tokyo Electron Miyagi Limited, Japan

Topic: Ultra-high-aspect-ratio etching utilizing innovative cryogenic process


Keynote III Symposium B.

Prof. Satoshi Hamaguchi

Osaka University, Japan

Topic: Myths and Imperfections of (Nevertheless Useful) Atomic-Layer Etching


Keynote IV Symposium C.

Prof. Lars Hultman

Linkoping University

Topic: PVD eco-deposition for sustainable development: low temperature thin film growth using metal-ion/surface interactions


Keynote V Symposium B.

Prof. Toshiro Kaneko

Tohoku University, Japan

Topic: Reactive Nitrogen Species Synthesized by Air Plasma to Achieve Sustainable Farming


Keynote VI Symposium B.

Prof. Jenq-Gong Duh

National Tsing Hua University, Taiwan

Topic: The applications of atmospheric pressure plasma jet on lithium-ion battery and food waste


Keynote VII Symposium C.

Prof. Ying-Hao Chu

National Tsing Hua University, Taiwan

Topic: Epitaxial Bi2O2x homojunctions for advanced electronics


Keynote VIII Symposium B.

Prof. Kazunori Koga

Sungkyunkwan University, Korea

Topic: Plasma Seed Treatment Technology for Providing Climate Change Adaptability of Plants


Keynote IX Symposium B.

Prof. Ray-Hua Horng

National Yang Ming Chiao Tung University, Taiwan

Topic: Study on blue light micro-light emitted diodes (< 20 µm) by neutral beam etching process


Keynote X Symposium B.

Prof. Noriyasu Ohno

Nagoya University, Japan

Topic: Investigation of Spatiotemporal Behaviors in Detached Recombing Plasmas Using a Linear High-Density Plasma Simulator