Program Committee

Symposium Chairs

Symposium A - Low temperature and cryogenic plasma etching technology

Prof. Remi Dussart*

GREMI - Université d'Orléans, France

Prof. Mark Kushner

University of Michigan, USA

Prof. Shih-Nan Hsiao

Nagoya University, Japan

Symposium B - Plasma technology

Prof. Satoshi Hamaguchi*

Osaka University, Japan

Prof. Oi Lun Helena LI

Pusan National University, Korea

Prof. Magdaleno R. Vasquez Jr.

University of the Philippines Diliman, Philippine

Symposium C - Thin film and coating technology for sustainable development goals

Prof. Yu-Ching Huang*

Ming Chi University of Technology, Taiwan

Prof. Wan-Yu Wu

National United University, Taiwan

Prof. Tetsuhide Shimizu

Tokyo Metropolitan University, Japan